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Assoc. Prof. Munehiro OGASAWARA(NuFlare Future Technology Laboratory)
I am Munehiro Ogasawara, and was appointed as an specially appointed associate professor of the NuFlare Future Technology Laboratory in the Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST) on April 1st, 2018. I have been engaged in development of electron beam mask writers at NuFlare Technology, Inc. To meet the everlasting demand for higher writing speed and pattern accuracy on the electron beam writing, we must develop new technologies, which require of us deeper understanding of the mechanism hidden in observed phenomena. With the goal of contributing to the realization of a next generation writing system, I will try my best to explore and verify the new technologies. I am looking forward to working in new development circumstances.